Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491571 | Substrate for use in wafer attracting apparatus and manufacturing method thereof | Masashi Ohno, Takahiro Inoue, Kouji Kato | 2002-12-10 |
| 6471779 | Gas feed ceramic structure for semiconductor-producing apparatus | Akifumi Nishio, Masahiro Hori | 2002-10-29 |
| 6432208 | Plasma processing apparatus | Satoru Kawakami, Katsuhiko Iwabuchi, Ryo Kuwajima, Ryusuke Ushikoshi, Tetsuya Kawajiri | 2002-08-13 |