Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491571 | Substrate for use in wafer attracting apparatus and manufacturing method thereof | Masashi Ohno, Naohito Yamada, Takahiro Inoue | 2002-12-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491571 | Substrate for use in wafer attracting apparatus and manufacturing method thereof | Masashi Ohno, Naohito Yamada, Takahiro Inoue | 2002-12-10 |