Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483892 | Volumetric computed tomography (CT) fluoroscopy system for small animal studies | Ying Liu | 2002-11-19 |
| 6479881 | Low temperature process for forming intermetal gap-filling insulating layers in silicon wafer integrated circuitry | Chun-Ching Tsan, Jowei Dun, Hung-Ju Chien | 2002-11-12 |
| 6479098 | Method to solve particle performance of FSG layer by using UFU season film for FSG process | Ming-Hwa Yoo, Yi-Lung Cheng, Szu-An Wu | 2002-11-12 |
| 6436791 | Method of manufacturing a very deep STI (shallow trench isolation) | Shih-Chi Lin, Szu-An Wu, Guey Bao Huang | 2002-08-20 |
| 6407007 | Method to solve the delamination of a silicon nitride layer from an underlying spin on glass layer | Chun-Ching Tsan, Hui Wang, Chin Kun Lan | 2002-06-18 |
| 6399522 | PE-silane oxide particle performance improvement | Chun-Ching Tsan, Hung-Ju Chien, Chun-Chang Chen | 2002-06-04 |
| 6395635 | Reduction of tungsten damascene residue | Jowei Dun | 2002-05-28 |
| 6372645 | Methods to reduce metal bridges and line shorts in integrated circuits | Chung-Shi Liu, Shau-Lin Shue, Chen-Hua Yu, Shih-Chi Lin, Ming-Jer Lee +1 more | 2002-04-16 |
| 6352924 | Rework method for wafers that trigger WCVD backside alarm | Jun Wu, Ming-Jer Lee, Yu-Ku Lin | 2002-03-05 |