Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472719 | Method of manufacturing air gap in multilevel interconnection | Yen-Ming Chen, Juin-Jie Chang, Kuei-Wu Huang | 2002-10-29 |
| 6436791 | Method of manufacturing a very deep STI (shallow trench isolation) | Szu-An Wu, Ying-Lang Wang, Guey Bao Huang | 2002-08-20 |
| 6429538 | Method for making a novel graded silicon nitride/silicon oxide (SNO) hard mask for improved deep sub-micrometer semiconductor processing | — | 2002-08-06 |
| 6372645 | Methods to reduce metal bridges and line shorts in integrated circuits | Chung-Shi Liu, Shau-Lin Shue, Chen-Hua Yu, Ming-Jer Lee, Ying-Lang Wang +1 more | 2002-04-16 |