Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479098 | Method to solve particle performance of FSG layer by using UFU season film for FSG process | Ming-Hwa Yoo, Yi-Lung Cheng, Ying-Lang Wang | 2002-11-12 |
| 6436791 | Method of manufacturing a very deep STI (shallow trench isolation) | Shih-Chi Lin, Ying-Lang Wang, Guey Bao Huang | 2002-08-20 |
| 6358761 | Silicon monitor for detection of H2O2 in acid bath | Hui-Ju Yoo, Cheng-Kun Lin, Shiow-Jye Jenq | 2002-03-19 |