Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436253 | Sputter etching chamber with improved uniformity | Chin-Shien Yang, Chuan-Huai Chen | 2002-08-20 |
| 6358761 | Silicon monitor for detection of H2O2 in acid bath | Hui-Ju Yoo, Szu-An Wu, Shiow-Jye Jenq | 2002-03-19 |
| 6342135 | Sputter etching chamber with improved uniformity | Chin-Shien Yang, Chuan-Huai Chen | 2002-01-29 |