Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436253 | Sputter etching chamber with improved uniformity | Chuan-Huai Chen, Cheng-Kun Lin | 2002-08-20 |
| 6342135 | Sputter etching chamber with improved uniformity | Chuan-Huai Chen, Cheng-Kun Lin | 2002-01-29 |