Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499222 | Template for measuring edge width and method of using | Ying Chen, Wen-Kung Cheng, Yin-Lang Wang | 2002-12-31 |
| 6479881 | Low temperature process for forming intermetal gap-filling insulating layers in silicon wafer integrated circuitry | Ying-Lang Wang, Chun-Ching Tsan, Jowei Dun | 2002-11-12 |
| 6397664 | Method and apparatus for detecting leakage in a flow control valve | Chin Chung Lee | 2002-06-04 |
| 6399522 | PE-silane oxide particle performance improvement | Chun-Ching Tsan, Chun-Chang Chen, Ying-Lang Wang | 2002-06-04 |