Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479881 | Low temperature process for forming intermetal gap-filling insulating layers in silicon wafer integrated circuitry | Ying-Lang Wang, Jowei Dun, Hung-Ju Chien | 2002-11-12 |
| 6407007 | Method to solve the delamination of a silicon nitride layer from an underlying spin on glass layer | Ying-Lang Wang, Hui Wang, Chin Kun Lan | 2002-06-18 |
| 6399522 | PE-silane oxide particle performance improvement | Hung-Ju Chien, Chun-Chang Chen, Ying-Lang Wang | 2002-06-04 |