Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6407007 | Method to solve the delamination of a silicon nitride layer from an underlying spin on glass layer | Chun-Ching Tsan, Ying-Lang Wang, Chin Kun Lan | 2002-06-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6407007 | Method to solve the delamination of a silicon nitride layer from an underlying spin on glass layer | Chun-Ching Tsan, Ying-Lang Wang, Chin Kun Lan | 2002-06-18 |