Issued Patents 2002
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500971 | Ester compounds having alicyclic and oxirane structures and method for preparing the same | Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima +1 more | 2002-12-31 |
| 6500961 | Lactone compounds having alicyclic structure and their manufacturing method | Takeshi Kinsho, Koji Hasegawa, Takeru Watanabe, Tsunehiro Nishi, Mutsuo Nakashima +1 more | 2002-12-31 |
| 6492090 | Polymers, resist compositions and patterning process | Tsunehiro Nishi, Seiichiro Tachibana, Mutsuo Nakashima, Takeshi Kinsho, Takeru Watanabe +1 more | 2002-12-10 |
| 6492089 | Polymer, resist composition and patterning process | Takeshi Kinsho, Mutsuo Nakashima, Koji Hasegawa | 2002-12-10 |
| 6472543 | Lactone compounds having alicyclic structure and their manufacturing method | Takeshi Kinsho, Takeru Watanabe, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima +1 more | 2002-10-29 |
| 6461789 | Polymers, chemical amplification resist compositions and patterning process | Jun Watanabe, Yuji Harada | 2002-10-08 |
| 6461791 | Polymers, chemical amplification resist compositions and patterning process | Yuji Harada, Jun Watanabe, Mutsuo Nakashima | 2002-10-08 |
| 6461790 | Polymers, chemical amplification resist compositions and patterning process | Jun Watanabe, Yuji Harada, Mutsuo Nakashima, Masaru Sasago, Shinji Kishimura | 2002-10-08 |
| 6455223 | Resist compositions and patterning process | Tomohiro Kobayashi, Osamu Watanabe, Takanobu Takeda, Toshinobu Ishihara, Jun Watanabe | 2002-09-24 |
| 6448420 | Acid-decomposable ester compound suitable for use in resist material | Takeshi Kinsho, Tsunehiro Nishi, Takeru Watanabe, Koji Hasegawa, Mutsuo Nakashima | 2002-09-10 |
| 6444396 | Ester compounds, polymers, resist composition and patterning process | Takeru Watanabe, Takeshi Kinsho, Tsunehiro Nishi, Mutsuo Nakashima, Koji Hasegawa | 2002-09-03 |
| 6436606 | Polymers, resist compositions and patterning process | Jun Watanabe, Yuji Harada | 2002-08-20 |
| 6420085 | Resist compositions and patterning process | Tsunehiro Nishi, Youichi Ohsawa | 2002-07-16 |
| 6414101 | Dendritic polymers and making method | Osamu Watanabe, Takanobu Takeda, Tomohiro Kobayashi, Toshinobu Ishihara, Jun Watanabe | 2002-07-02 |
| 6413695 | Resist compositions and patterning process | Tsunehiro Nishi, Takeshi Kinsho, Takeru Watanabe, Koji Hasegawa, Mutsuo Nakashima | 2002-07-02 |
| 6403822 | Ester compounds having alicyclic structure and method for preparing same | Takeru Watanabe, Koji Hasegawa, Takeshi Kinsho, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-06-11 |
| 6403823 | Ester compounds having alicyclic structure and method for preparing same | Koji Hasegawa, Takeru Watanabe, Takeshi Kinsho, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-06-11 |
| 6399274 | Resist composition and patterning process | Takeshi Kinsho, Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe | 2002-06-04 |
| 6369279 | Styrene derivatives | Mutsuo Nakashima, Jun Watanabe, Yuji Harada | 2002-04-09 |