Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475706 | Pattern formation method | Shinji Kishimura, Akiko Katsuyama | 2002-11-05 |
| 6461790 | Polymers, chemical amplification resist compositions and patterning process | Jun Hatakeyama, Jun Watanabe, Yuji Harada, Mutsuo Nakashima, Shinji Kishimura | 2002-10-08 |
| 6444395 | Pattern formation material and method | Shinji Kishimura, Akiko Katsuyama | 2002-09-03 |
| 6429143 | Pattern formation method | Masayuki Endo | 2002-08-06 |