Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475706 | Pattern formation method | Akiko Katsuyama, Masaru Sasago | 2002-11-05 |
| 6461790 | Polymers, chemical amplification resist compositions and patterning process | Jun Hatakeyama, Jun Watanabe, Yuji Harada, Mutsuo Nakashima, Masaru Sasago | 2002-10-08 |
| 6444395 | Pattern formation material and method | Akiko Katsuyama, Masaru Sasago | 2002-09-03 |