Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461789 | Polymers, chemical amplification resist compositions and patterning process | Jun Hatakeyama, Jun Watanabe | 2002-10-08 |
| 6461790 | Polymers, chemical amplification resist compositions and patterning process | Jun Hatakeyama, Jun Watanabe, Mutsuo Nakashima, Masaru Sasago, Shinji Kishimura | 2002-10-08 |
| 6461791 | Polymers, chemical amplification resist compositions and patterning process | Jun Hatakeyama, Jun Watanabe, Mutsuo Nakashima | 2002-10-08 |
| 6436606 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Jun Watanabe | 2002-08-20 |
| 6369279 | Styrene derivatives | Mutsuo Nakashima, Jun Hatakeyama, Jun Watanabe | 2002-04-09 |