Issued Patents 2002
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500971 | Ester compounds having alicyclic and oxirane structures and method for preparing the same | Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-12-31 |
| 6500961 | Lactone compounds having alicyclic structure and their manufacturing method | Takeshi Kinsho, Koji Hasegawa, Takeru Watanabe, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-12-31 |
| 6492090 | Polymers, resist compositions and patterning process | Seiichiro Tachibana, Mutsuo Nakashima, Takeshi Kinsho, Takeru Watanabe, Koji Hasegawa +1 more | 2002-12-10 |
| 6472543 | Lactone compounds having alicyclic structure and their manufacturing method | Takeshi Kinsho, Takeru Watanabe, Koji Hasegawa, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-10-29 |
| 6448420 | Acid-decomposable ester compound suitable for use in resist material | Takeshi Kinsho, Takeru Watanabe, Koji Hasegawa, Mutsuo Nakashima, Jun Hatakeyama | 2002-09-10 |
| 6444396 | Ester compounds, polymers, resist composition and patterning process | Takeru Watanabe, Takeshi Kinsho, Mutsuo Nakashima, Koji Hasegawa, Jun Hatakeyama | 2002-09-03 |
| 6420085 | Resist compositions and patterning process | Youichi Ohsawa, Jun Hatakeyama | 2002-07-16 |
| 6413695 | Resist compositions and patterning process | Takeshi Kinsho, Takeru Watanabe, Koji Hasegawa, Mutsuo Nakashima, Jun Hatakeyama | 2002-07-02 |
| 6403823 | Ester compounds having alicyclic structure and method for preparing same | Koji Hasegawa, Takeru Watanabe, Takeshi Kinsho, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-06-11 |
| 6403822 | Ester compounds having alicyclic structure and method for preparing same | Takeru Watanabe, Koji Hasegawa, Takeshi Kinsho, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-06-11 |
| 6399274 | Resist composition and patterning process | Takeshi Kinsho, Koji Hasegawa, Takeru Watanabe, Jun Hatakeyama | 2002-06-04 |