Issued Patents 2002
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500971 | Ester compounds having alicyclic and oxirane structures and method for preparing the same | Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-12-31 |
| 6500961 | Lactone compounds having alicyclic structure and their manufacturing method | Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-12-31 |
| 6492090 | Polymers, resist compositions and patterning process | Tsunehiro Nishi, Seiichiro Tachibana, Mutsuo Nakashima, Takeshi Kinsho, Koji Hasegawa +1 more | 2002-12-10 |
| 6472543 | Lactone compounds having alicyclic structure and their manufacturing method | Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-10-29 |
| 6469220 | Tertiary alcohol compounds having an alicyclic structure | Koji Hasegawa, Takeshi Kinsho | 2002-10-22 |
| 6448420 | Acid-decomposable ester compound suitable for use in resist material | Takeshi Kinsho, Tsunehiro Nishi, Koji Hasegawa, Mutsuo Nakashima, Jun Hatakeyama | 2002-09-10 |
| 6444396 | Ester compounds, polymers, resist composition and patterning process | Takeshi Kinsho, Tsunehiro Nishi, Mutsuo Nakashima, Koji Hasegawa, Jun Hatakeyama | 2002-09-03 |
| 6413695 | Resist compositions and patterning process | Tsunehiro Nishi, Takeshi Kinsho, Koji Hasegawa, Mutsuo Nakashima, Jun Hatakeyama | 2002-07-02 |
| 6403823 | Ester compounds having alicyclic structure and method for preparing same | Koji Hasegawa, Takeshi Kinsho, Mutsuo Nakashima, Seiichiro Tachibana, Tsunehiro Nishi +1 more | 2002-06-11 |
| 6403822 | Ester compounds having alicyclic structure and method for preparing same | Koji Hasegawa, Takeshi Kinsho, Mutsuo Nakashima, Seiichiro Tachibana, Tsunehiro Nishi +1 more | 2002-06-11 |
| 6399274 | Resist composition and patterning process | Takeshi Kinsho, Tsunehiro Nishi, Koji Hasegawa, Jun Hatakeyama | 2002-06-04 |
| 6337415 | Process for preparing tetrakis (trimethylsily) silane and tris (trimethysilyl) silane | Ayumu Kiyomori, Tohru Kubota, Takeshi Kinsho, Koji Hasegawa | 2002-01-08 |