Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440634 | Onium salts, photoacid generators for resist compositions, resist compositions, and patterning process | Jun Watanabe, Wataru Kusaki, Satoshi Watanabe, Takeshi Nagata, Shigehiro Nagura | 2002-08-27 |
| 6420085 | Resist compositions and patterning process | Tsunehiro Nishi, Jun Hatakeyama | 2002-07-16 |
| 6416928 | Onium salts, photoacid generators, resist compositions, and patterning process | Jun Watanabe, Satoshi Watanabe, Shigehiro Nagura | 2002-07-09 |
| 6395446 | Resist compositions and patterning process | Akihiro Seki, Katsuya Takemura, Jun Watanabe, Shigehiro Nagura | 2002-05-28 |
| 6338931 | Resist compositions and patterning process | Kazunori Maeda, Takeshi Nagata, Satoshi Watanabe, Jun Watanabe, Shigehiro Nagura | 2002-01-15 |