Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440634 | Onium salts, photoacid generators for resist compositions, resist compositions, and patterning process | Youichi Ohsawa, Jun Watanabe, Wataru Kusaki, Satoshi Watanabe, Takeshi Nagata | 2002-08-27 |
| 6416928 | Onium salts, photoacid generators, resist compositions, and patterning process | Youichi Ohsawa, Jun Watanabe, Satoshi Watanabe | 2002-07-09 |
| 6395446 | Resist compositions and patterning process | Akihiro Seki, Katsuya Takemura, Youichi Ohsawa, Jun Watanabe | 2002-05-28 |
| 6338931 | Resist compositions and patterning process | Kazunori Maeda, Takeshi Nagata, Satoshi Watanabe, Youichi Ohsawa, Jun Watanabe | 2002-01-15 |
| 6335141 | Chemically amplified positive resist composition, pattern forming method, and method for preparing polymer having a crosslinking group | Satoshi Watanabe, Osamu Watanabe, Tomoyoshi Furihata, Yoshihumi Takeda, Toshinobu Ishihara +1 more | 2002-01-01 |