Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6437058 | Polymers and positive resist compositions | Hideto Kato, Yoshinori Hirano | 2002-08-20 |
| 6383944 | Micropatterning method | Hideto Kato, Satoshi Okazaki | 2002-05-07 |
| 6335141 | Chemically amplified positive resist composition, pattern forming method, and method for preparing polymer having a crosslinking group | Satoshi Watanabe, Osamu Watanabe, Yoshihumi Takeda, Shigehiro Nagura, Toshinobu Ishihara +1 more | 2002-01-01 |