Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383944 | Micropatterning method | Tomoyoshi Furihata, Hideto Kato | 2002-05-07 |
| 6352801 | Phase shift mask and making process | Hideo Kaneko, Tamotsu Maruyama, Yukio Inazuki | 2002-03-05 |