Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451489 | Phase shift photomask | — | 2002-09-17 |
| 6352801 | Phase shift mask and making process | Satoshi Okazaki, Tamotsu Maruyama, Yukio Inazuki | 2002-03-05 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451489 | Phase shift photomask | — | 2002-09-17 |
| 6352801 | Phase shift mask and making process | Satoshi Okazaki, Tamotsu Maruyama, Yukio Inazuki | 2002-03-05 |