Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6362076 | Method of fabricating an SOI wafer by hydrogen ion delamination without independent bonding heat treatment | Hiroji Aga, Norihiro Kobayashi, Kiyoshi Mitani | 2002-03-26 |
| 6352801 | Phase shift mask and making process | Satoshi Okazaki, Hideo Kaneko, Tamotsu Maruyama | 2002-03-05 |