Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461939 | SOI wafers and methods for producing SOI wafer | Jun-ichiro Furihata, Kiyoshi Mitani, Shoji Akiyama | 2002-10-08 |
| 6413310 | Method for producing silicon single crystal wafer and silicon single crystal wafer | Masaro Tamatsuka, Shoji Akiyama, Masaru Shinomiya | 2002-07-02 |
| 6403502 | Heat treatment method for a silicon wafer and a silicon wafer heat-treated by the method | Satoshi Oka, Takao Abe | 2002-06-11 |
| 6391796 | Method for heat-treating silicon wafer and silicon wafer | Shoji Akiyama | 2002-05-21 |
| 6362076 | Method of fabricating an SOI wafer by hydrogen ion delamination without independent bonding heat treatment | Yukio Inazuki, Hiroji Aga, Kiyoshi Mitani | 2002-03-26 |