Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461939 | SOI wafers and methods for producing SOI wafer | Jun-ichiro Furihata, Norihiro Kobayashi, Shoji Akiyama | 2002-10-08 |
| 6372609 | Method of Fabricating SOI wafer by hydrogen ION delamination method and SOI wafer fabricated by the method | Hiroji Aga, Naoto Tate | 2002-04-16 |
| 6362076 | Method of fabricating an SOI wafer by hydrogen ion delamination without independent bonding heat treatment | Yukio Inazuki, Hiroji Aga, Norihiro Kobayashi | 2002-03-26 |