Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372609 | Method of Fabricating SOI wafer by hydrogen ION delamination method and SOI wafer fabricated by the method | Hiroji Aga, Kiyoshi Mitani | 2002-04-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372609 | Method of Fabricating SOI wafer by hydrogen ION delamination method and SOI wafer fabricated by the method | Hiroji Aga, Kiyoshi Mitani | 2002-04-16 |