Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492682 | Method of producing a bonded wafer and the bonded wafer | Masaro Tamatsuka | 2002-12-10 |
| 6478908 | Production method of and production apparatus for optical recording disc | Kokichi Kohinata, Yoshinori Itaba, Tokuhiro Morioka | 2002-11-12 |
| 6467170 | Tube for heat exchangers and method of manufacturing same | Soichi Kato, Muneo Sakurada, Shin Kurihara, Sadao Haiya, Takashi Sugita +1 more | 2002-10-22 |
| 6461939 | SOI wafers and methods for producing SOI wafer | Jun-ichiro Furihata, Kiyoshi Mitani, Norihiro Kobayashi | 2002-10-08 |
| 6413310 | Method for producing silicon single crystal wafer and silicon single crystal wafer | Masaro Tamatsuka, Norihiro Kobayashi, Masaru Shinomiya | 2002-07-02 |
| 6391796 | Method for heat-treating silicon wafer and silicon wafer | Norihiro Kobayashi | 2002-05-21 |
| 6357520 | Heat exchanger | Soichi Kato, Muneo Sakurada, Shin Kurihara, Sadao Haiya, Takashi Sugita +1 more | 2002-03-19 |