Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492682 | Method of producing a bonded wafer and the bonded wafer | Shoji Akiyama | 2002-12-10 |
| 6478883 | Silicon single crystal wafer, epitaxial silicon wafer, and methods for producing them | Ken Aihara, Katsuhiko Miki, Hiroshi Takeno, Yoshinori Hayamizu | 2002-11-12 |
| 6413310 | Method for producing silicon single crystal wafer and silicon single crystal wafer | Norihiro Kobayashi, Shoji Akiyama, Masaru Shinomiya | 2002-07-02 |