Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478883 | Silicon single crystal wafer, epitaxial silicon wafer, and methods for producing them | Masaro Tamatsuka, Ken Aihara, Katsuhiko Miki, Hiroshi Takeno | 2002-11-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478883 | Silicon single crystal wafer, epitaxial silicon wafer, and methods for producing them | Masaro Tamatsuka, Ken Aihara, Katsuhiko Miki, Hiroshi Takeno | 2002-11-12 |