Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6352801 | Phase shift mask and making process | Satoshi Okazaki, Hideo Kaneko, Yukio Inazuki | 2002-03-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6352801 | Phase shift mask and making process | Satoshi Okazaki, Hideo Kaneko, Yukio Inazuki | 2002-03-05 |