Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455223 | Resist compositions and patterning process | Jun Hatakeyama, Tomohiro Kobayashi, Osamu Watanabe, Takanobu Takeda, Jun Watanabe | 2002-09-24 |
| 6414101 | Dendritic polymers and making method | Osamu Watanabe, Takanobu Takeda, Jun Hatakeyama, Tomohiro Kobayashi, Jun Watanabe | 2002-07-02 |
| 6335141 | Chemically amplified positive resist composition, pattern forming method, and method for preparing polymer having a crosslinking group | Satoshi Watanabe, Osamu Watanabe, Tomoyoshi Furihata, Yoshihumi Takeda, Shigehiro Nagura +1 more | 2002-01-01 |