Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440634 | Onium salts, photoacid generators for resist compositions, resist compositions, and patterning process | Youichi Ohsawa, Jun Watanabe, Wataru Kusaki, Satoshi Watanabe, Shigehiro Nagura | 2002-08-27 |
| 6429411 | Magnetic tape processing method and magnetic tape processing apparatus having an optical system | Osamu Iwasaki, Satoru Hayakawa, Hiroo Inaba | 2002-08-06 |
| 6338931 | Resist compositions and patterning process | Kazunori Maeda, Satoshi Watanabe, Youichi Ohsawa, Jun Watanabe, Shigehiro Nagura | 2002-01-15 |