Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440634 | Onium salts, photoacid generators for resist compositions, resist compositions, and patterning process | Youichi Ohsawa, Jun Watanabe, Satoshi Watanabe, Takeshi Nagata, Shigehiro Nagura | 2002-08-27 |