Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406933 | Production method for micromechanical components | Klaus-Gunter Oppermann, Hergen Kapels | 2002-06-18 |
| 6401544 | Micromechanical component protected from environmental influences | Christofer Hierold, Hergen Kapels, Stefan Kolb, Dieter Maier-Schneider, Klaus-Gunter Oppermann +3 more | 2002-06-11 |
| 6389902 | Micromechanical sensor and method for its production | Hans-Jörg Timme, Thomas Bever | 2002-05-21 |
| 6357299 | Micromechanical sensor and method for producing the same | Thomas Bever, Hans-Jörg Timme | 2002-03-19 |
| 6346429 | Method for fabricating integrated sensors | Hergen Kapels, Andreas Meckes, Klaus-Gunter Oppermann | 2002-02-12 |