Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406933 | Production method for micromechanical components | Robert Aigner, Klaus-Gunter Oppermann | 2002-06-18 |
| 6401544 | Micromechanical component protected from environmental influences | Robert Aigner, Christofer Hierold, Stefan Kolb, Dieter Maier-Schneider, Klaus-Gunter Oppermann +3 more | 2002-06-11 |
| 6346429 | Method for fabricating integrated sensors | Robert Aigner, Andreas Meckes, Klaus-Gunter Oppermann | 2002-02-12 |