Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6426582 | Micromechanical, capacitative ultrasound transducer and method for the manufacture thereof | Kurt W. Niederer, Peter-Christian Eccardt | 2002-07-30 |
| 6401544 | Micromechanical component protected from environmental influences | Robert Aigner, Christofer Hierold, Hergen Kapels, Stefan Kolb, Klaus-Gunter Oppermann +3 more | 2002-06-11 |
| 6373115 | Micromechanical structure, sensor and method for manufacturing the same | Stefan Kolb, Klaus-Gunter Oppermann, Hans-Jörg Timme | 2002-04-16 |