Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6401544 | Micromechanical component protected from environmental influences | Robert Aigner, Hergen Kapels, Stefan Kolb, Dieter Maier-Schneider, Klaus-Gunter Oppermann +3 more | 2002-06-11 |
| 6382588 | Microvalve | — | 2002-05-07 |