Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406933 | Production method for micromechanical components | Robert Aigner, Hergen Kapels | 2002-06-18 |
| 6401544 | Micromechanical component protected from environmental influences | Robert Aigner, Christofer Hierold, Hergen Kapels, Stefan Kolb, Dieter Maier-Schneider +3 more | 2002-06-11 |
| 6373115 | Micromechanical structure, sensor and method for manufacturing the same | Stefan Kolb, Dieter Maier-Schneider, Hans-Jörg Timme | 2002-04-16 |
| 6346429 | Method for fabricating integrated sensors | Robert Aigner, Hergen Kapels, Andreas Meckes | 2002-02-12 |