Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6401544 | Micromechanical component protected from environmental influences | Robert Aigner, Christofer Hierold, Hergen Kapels, Stefan Kolb, Dieter Maier-Schneider +3 more | 2002-06-11 |
| 6389902 | Micromechanical sensor and method for its production | Robert Aigner, Thomas Bever | 2002-05-21 |
| 6373115 | Micromechanical structure, sensor and method for manufacturing the same | Stefan Kolb, Dieter Maier-Schneider, Klaus-Gunter Oppermann | 2002-04-16 |
| 6357298 | Micromechanical sensor and method for operating the sensor | Dieter Draxelmayr | 2002-03-19 |
| 6357299 | Micromechanical sensor and method for producing the same | Robert Aigner, Thomas Bever | 2002-03-19 |