Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6389902 | Micromechanical sensor and method for its production | Robert Aigner, Hans-Jörg Timme | 2002-05-21 |
| 6357299 | Micromechanical sensor and method for producing the same | Robert Aigner, Hans-Jörg Timme | 2002-03-19 |