Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6401544 | Micromechanical component protected from environmental influences | Robert Aigner, Christofer Hierold, Hergen Kapels, Dieter Maier-Schneider, Klaus-Gunter Oppermann +3 more | 2002-06-11 |
| 6379990 | Method of fabricating a micromechanical semiconductor configuration | Karlheinz Muller | 2002-04-30 |
| 6373115 | Micromechanical structure, sensor and method for manufacturing the same | Dieter Maier-Schneider, Klaus-Gunter Oppermann, Hans-Jörg Timme | 2002-04-16 |
| 6355964 | Microelectronic integrated sensor | Karlheinz Mueller | 2002-03-12 |