Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6379990 | Method of fabricating a micromechanical semiconductor configuration | Stefan Kolb | 2002-04-30 |
| 6365525 | Method of fabricating a semiconductor insulation layer | — | 2002-04-02 |