Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500321 | Control of erosion profile and process characteristics in magnetron sputtering by geometrical shaping of the sputtering target | Kaihan Ashtiani, Larry D. Hartsough, Richard S. Hill, Karl B. Levy | 2002-12-31 |
| 6497734 | Apparatus and method for enhanced degassing of semiconductor wafers for increased throughput | Kenneth K. Barber, Mark Fissel, Soo Yun Joh, Mukul Khosla, Karl B. Levy +2 more | 2002-12-24 |
| 6413381 | Horizontal sputtering system | Ken Kinsun Lee, Ke Ling Lee, Mingwei Jiang | 2002-07-02 |
| 6406598 | System and method for transporting and sputter coating a substrate in a sputter deposition system | Ke Ling Lee, Mikhail Mazur, Ken Kinsun Lee | 2002-06-18 |