Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413381 | Horizontal sputtering system | Ken Kinsun Lee, Mingwei Jiang, Robert Martinson | 2002-07-02 |
| 6406598 | System and method for transporting and sputter coating a substrate in a sputter deposition system | Mikhail Mazur, Ken Kinsun Lee, Robert Martinson | 2002-06-18 |