Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413381 | Horizontal sputtering system | Ke Ling Lee, Mingwei Jiang, Robert Martinson | 2002-07-02 |
| 6406598 | System and method for transporting and sputter coating a substrate in a sputter deposition system | Ke Ling Lee, Mikhail Mazur, Robert Martinson | 2002-06-18 |
| 6402903 | Magnetic array for sputtering system | Mingwei Jiang, Gil Lavi | 2002-06-11 |