Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406598 | System and method for transporting and sputter coating a substrate in a sputter deposition system | Ke Ling Lee, Ken Kinsun Lee, Robert Martinson | 2002-06-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406598 | System and method for transporting and sputter coating a substrate in a sputter deposition system | Ke Ling Lee, Ken Kinsun Lee, Robert Martinson | 2002-06-18 |