Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500321 | Control of erosion profile and process characteristics in magnetron sputtering by geometrical shaping of the sputtering target | Kaihan Ashtiani, Larry D. Hartsough, Karl B. Levy, Robert Martinson | 2002-12-31 |