Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497734 | Apparatus and method for enhanced degassing of semiconductor wafers for increased throughput | Kenneth K. Barber, Mark Fissel, Soo Yun Joh, Karl B. Levy, Robert Martinson +2 more | 2002-12-24 |
| 6441370 | Linear multipole rod assembly for mass spectrometers | Berg A. Tehlirian | 2002-08-27 |