Issued Patents 2002
Showing 1–25 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499425 | Quasi-remote plasma processing method and apparatus | Sujit Sharan, Anand Srinivasan | 2002-12-31 |
| 6501179 | Constructions comprising insulative materials | Werner Juengling, Kirk D. Prall, Ravi Iyer, Guy T. Blalock | 2002-12-31 |
| 6495457 | Method of reducing carbon incorporation into films produced by chemical vapor deposition involving organic precursor compounds | — | 2002-12-17 |
| 6495427 | Method for forming a capacitor compatible with high dielectric constant materials having two independent insulative layers | Pierre C. Fazan | 2002-12-17 |
| 6495468 | Laser ablative removal of photoresist | Shubneesh Batra | 2002-12-17 |
| 6492241 | Integrated capacitors fabricated with conductive metal oxides | Howard E. Rhodes, Mark Visokay, Tom Graettinger, Dan Gealy, Cem Basceri +1 more | 2002-12-10 |
| 6488566 | System for real-time control of semiconductor wafer polishing | Trung T. Doan | 2002-12-03 |
| 6489199 | Multiple step methods for forming conformal layers | Weimin Li | 2002-12-03 |
| 6479297 | Sensor devices, methods and systems for detecting gas phase materials | — | 2002-11-12 |
| 6475921 | Mask for producing rectangular openings in a substrate | — | 2002-11-05 |
| 6476432 | Structures and methods for enhancing capacitors in integrated circuits | Cem Basceri | 2002-11-05 |
| 6472756 | Method of forming titanium silicide and titanium by chemical vapor deposition and resulting apparatus | Trung T. Doan, Kirk D. Prall, Sujit Sharan | 2002-10-29 |
| 6472320 | Method of producing rough polysilicon by the use of pulsed plasma chemical vapor deposition and products produced by the same | Trung T. Doan | 2002-10-29 |
| 6464560 | System for real-time control of semiconductor wafer polishing | Trung T. Doan | 2002-10-15 |
| 6464561 | System for real-time control of semiconductor wafer polishing | Trung T. Doan | 2002-10-15 |
| 6464564 | System for real-time control of semiconductor wafer polishing | Trung T. Doan | 2002-10-15 |
| 6462313 | Method and apparatus to control temperature in an RTP system | — | 2002-10-08 |
| 6461950 | Semiconductor processing methods, semiconductor circuitry, and gate stacks | Zhiping Yin, Ravi Iyer, Thomas R. Glass, Richard Holscher, Ardavan Niroomand +1 more | 2002-10-08 |
| 6458416 | Deposition methods | Garo Derderian | 2002-10-01 |
| 6455394 | Method for trench isolation by selective deposition of low temperature oxide films | Ravi Iyer, Pai-Hung Pan | 2002-09-24 |
| 6455439 | Method of forming a mask | — | 2002-09-24 |
| 6444556 | Chemistry for chemical vapor deposition of titanium containing films | Sujit Sharan, Howard E. Rhodes, Philip J. Ireland | 2002-09-03 |
| 6436246 | Collimated sputter deposition monitor using sheet resistance | — | 2002-08-20 |
| 6436247 | Collimated sputter deposition monitor using sheet resistance | — | 2002-08-20 |
| 6433434 | Apparatus having a titanium alloy layer | Donald L. Westmoreland | 2002-08-13 |