Issued Patents 2002
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6362088 | Method of forming ohmic conductive components in a single chamber process | Sujit Sharan | 2002-03-26 |
| 6358801 | Method and apparatus for trench isolation process with pad gate and trench edge spacer elimination | Pierre C. Fazan | 2002-03-19 |
| 6358756 | Self-aligned, magnetoresistive random-access memory (MRAM) structure utilizing a spacer containment scheme | Roger Lee, Dennis Keller, Trung T. Doan, Max Hineman, Ren Earl | 2002-03-19 |
| 6355561 | ALD method to improve surface coverage | Garo Derderian | 2002-03-12 |
| 6348706 | Method to form etch and/or CMP stop layers | — | 2002-02-19 |
| 6344376 | Method of forming a thin film transistor | Shubneesh Batra, Pierre C. Fazan | 2002-02-05 |
| 6342417 | Methods of forming materials comprising tungsten and nitrogen | Vishnu K. Agarwal | 2002-01-29 |
| 6340499 | Method to increase gas residence time in a reactor | Ravi Iyer, Sujit Sharan | 2002-01-22 |
| 6338667 | System for real-time control of semiconductor wafer polishing | Trung T. Doan | 2002-01-15 |
| 6337237 | Capacitor processing method and DRAM processing method | Cem Basceri | 2002-01-08 |
| 6335282 | Method of forming a titanium comprising layer and method of forming a conductive silicide contact | Sujit Sharan | 2002-01-01 |