Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454957 | Ruthenium and ruthenium dioxide removal method and material | — | 2002-09-24 |
| 6451214 | Ruthenium and ruthenium dioxide removal method and material | — | 2002-09-17 |
| 6446933 | Film on a surface of a mold used during semiconductor device fabrication | — | 2002-09-10 |
| 6445023 | Mixed metal nitride and boride barrier layers | Brian A. Vaartstra | 2002-09-03 |
| 6433434 | Apparatus having a titanium alloy layer | Gurtej S. Sandhu | 2002-08-13 |
| 6428623 | Chemical vapor deposition apparatus with liquid feed | Gurtej S. Sandhu | 2002-08-06 |